EUV lithography optics from ZEISS
zeiss.com
EUV lithography optics from ZEISS
The next technological breakthrough for the semiconductor industry: EUV lithography optics from ZEISS SMT for even more powerful microchips. EUV means "extrem ultraviolet light".
Aug 2, 2022
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#Extreme Ultraviolet Lithography Process
Computing method for extreme ultraviolet lithography imaging with aberration consideration
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spiedigitallibrary.org4 months ago
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7.8K views · 172 reactions | What role does the reticle stage play in High NA extreme ultraviolet (EUV) lithography? In this video, learn how the reticle stage enables patterning in advanced chipmaking. You’ll see how 13.5 nanometer EUV light reflected into the system gets shaped by the illuminator and how a chip pattern gets encoded into the light for lithography. | ASML | Facebook
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7.8K views · 172 reactions | What role does the reticle stage play in High NA extreme ultraviolet (EUV) lithography? In this video, learn how the reticle stage enables patterning in advanced chipmaking. You’ll see how 13.5 nanometer EUV light reflected into the system gets shaped by the illuminator and how a chip pattern gets encoded into the light for lithography. | ASML | Facebook
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